Cleanroom robot and aligner using direct-drive servo motors enable high throughput. Loadports can be equipped with various units on the front, rear, and sides of the frame, and can interface directly with OHT and stocker systems.

	Compatible with 200 mm and 300 mm wafers
	Multiple pick-and-place options available
	Reads wafer top and bottom IDs
	Compatible with OHT and Stocker
	Optional edge detection feature