EFEM
Wafer Handling
| 特征 | |
 | By optionally equipping 2 Aligners, high throughput can be achieved |
| Vacuum adsorption-type wafer handling and edge gripping-type wafer handling (optional) |
| Compatible with 200mm/300mm (optional) |
| Compatible with OHT and Stocker |
| 選配 | |
| E84 |
| OCR |
| Ionizer |
| Autoteaching |
| Teaching pendant |
| Chemical Filter |
| Compatible with Barcode Reader and RF-ID Reader |
