The ABXY-ZT4 Series is a 6-DOF air-bearing and mechanical motion platform engineered for the rigorous demands of back-end exposure, wafer inspection, dicing, and annealing.

	Air bearings on X/Y axes for smooth motion
	T-axis: micro-rotational adjustment for leveling
	Dual-drive stepper axes with passive damping modules
	Z axis: fast and precise focusing motion